Ambient effects on the out-diffusion of GaAs through thin gold films

C. A. Chang; N. J. Chou

doi:10.1116/1.570670

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Ambient effects on the out-diffusion of GaAs through thin gold films

C. A. Chang N. J. Chou

Year: 1980 Journal: Journal of Vacuum Science and Technology Vol: 17 (6)Pages: 1358-1359 Publisher: American Institute of Physics

DOI: 10.1116/1.570670

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Abstract

We have studied the ambient effects on the out-diffusion of GaAs through thin gold films. Auger spectroscopic measurement shows accumulation of both Ga and As on the gold surface upon annealing in N2. The accumulation, however, is reduced in the presence of CO. This suppressed out-diffusion by CO is in agreement with the surface potential model recently proposed.

Keywords:

Annealing (glass) Auger electron spectroscopy Thin film Materials science Auger Diffusion Surface diffusion Gold alloys Analytical Chemistry (journal) Chemical physics Nanotechnology Chemistry Metallurgy Physical chemistry Alloy Atomic physics Thermodynamics Adsorption Environmental chemistry

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nanoparticles nucleation surface interactions

Physical Sciences → Earth and Planetary Sciences → Atmospheric Science

Surface and Thin Film Phenomena

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Chemical Physics Studies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ambient effects on the out-diffusion of GaAs through thin gold films

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