Technology and characteristics of 8-mega density CMOS image sensor (CIS) with unit pixel size of 1.75times1.75mum 2 are introduced. With recessed transfer gate (RTG) structure and other sophisticated process/device technology, remarkably enhanced saturation capacity and ultra-low dark current have been obtained, which satisfy the requirements of high density digital still camera (DSC) application
S. MendisSabrina E. KemenyEric R. Fossum
S.G. ChamberlainStacy R. KamaszCharles R. SmithWilliam D. WashkurakMichael G. Farrier
M. MoriMotonari KatsunoShigetaka KasugaTsuyoshi MurataTakumi Yamaguchi