JOURNAL ARTICLE

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Keywords:
Materials science Microelectromechanical systems Wafer dicing Wafer Silicon Fabrication Optoelectronics Polycrystalline silicon Encapsulation (networking) Nanotechnology Composite material Layer (electronics) Computer science

Metrics

29
Cited By
1.77
FWCI (Field Weighted Citation Impact)
10
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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