JOURNAL ARTICLE
Growth of Epitaxial Cubic SiC Thin Films Using Single Source Precursors
Jin Hyo BooSoon Bok LeeS. A. UstinWingkin HoH. P. MaruskaP. NorrisIl‐Ho KimC. Sung
Year: 1998 Journal: Materials science forum Vol: 264-268 Pages: 187-190 Publisher: Trans Tech Publications
Keywords:
Materials science Epitaxy Optoelectronics Thin film Engineering physics Nanotechnology Crystallography
Metrics
4
Cited By
1.77
FWCI (Field Weighted Citation Impact)
0
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Silicon Carbide Semiconductor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper-based nanomaterials and applications
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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