Electron beam induced crystallization of sputter deposited amorphous alumina thin films

Jack Murray; Kai Song; Wayne Huebner; Matthew J. O’Keefe

doi:10.1016/j.matlet.2012.01.039

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Electron beam induced crystallization of sputter deposited amorphous alumina thin films

Jack Murray Kai Song Wayne Huebner Matthew J. O’Keefe

Year: 2012 Journal: Materials Letters Vol: 74 Pages: 12-15 Publisher: Elsevier BV

DOI: 10.1016/j.matlet.2012.01.039

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Keywords:

Materials science Crystallization Transmission electron microscopy Amorphous solid Thin film Crystal (programming language) Acceleration voltage Cathode ray Sputtering Electron diffraction Diffraction Optoelectronics Optics Crystallography Electron Nanotechnology Chemical engineering Chemistry

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Glass properties and applications

Physical Sciences → Materials Science → Ceramics and Composites

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Electron beam induced crystallization of sputter deposited amorphous alumina thin films

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