JOURNAL ARTICLE

Crystallization behavior of sputter-deposited nitrogren-doped amorphous Ge2Sb2Te5 thin films

Keywords:
Crystallization Doping Sputtering Materials science Amorphous solid Thin film Sputter deposition Amorphous semiconductors Optoelectronics Chemical engineering Nanotechnology Crystallography Chemistry

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Topics

Phase-change materials and chalcogenides
Physical Sciences →  Materials Science →  Materials Chemistry
Chalcogenide Semiconductor Thin Films
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Glass properties and applications
Physical Sciences →  Materials Science →  Ceramics and Composites

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