JOURNAL ARTICLE

YBaCuO thin films deposited by ion beam sputtering assisted by implantation of: O, Ne, Ar, Cu, Kr, Xe and Ba

R.J. GaboriaudÉric SalmonStéphane Benayoun

Year: 1993 Journal:   Journal of Alloys and Compounds Vol: 195 Pages: 259-262   Publisher: Elsevier BV
Keywords:
Sputtering Materials science Thin film Ion Ion implantation Ion beam Analytical Chemistry (journal) Chemistry Atomic physics Nanotechnology Physics

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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
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