A STUDY OF DEPOSITED YBaCuO THIN FILMS BY D.C. MAGNETRON SPUTTERING

Abstract

The YBaCuO thin films with critical transition temperature above 77K (in our experiments, they are 83K) have been prepared successfully. The sintered oxides of Y, Ba and Cu with proper composition was used as target. To control the parameters during sputtering deposition processes is very important to obtain high T c thin film. The composition and phase structure were investigated by means of X-fluoroscope, electron-probe and X-ray diffractometer. The second ions spectroscopies of film and bulk sample were investigated using SIMS. It is clear that thin films lost their oxygen more easily under bombardment of Ar + with certain energy.