Preparation of superconducting YBaCuO thin films by rf magnetron sputtering

Huang Zongtan; Li Gouzhen; Zhen Guangli; Huang Jiangping

doi:10.1016/0042-207x(91)91344-n

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Preparation of superconducting YBaCuO thin films by rf magnetron sputtering

Huang Zongtan Li Gouzhen Zhen Guangli Huang Jiangping

Year: 1991 Journal: Vacuum Vol: 42 (16)Pages: 1063-1063 Publisher: Elsevier BV

DOI: 10.1016/0042-207x(91)91344-n

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Keywords:

Materials science Thin film Superconductivity Sputter deposition Annealing (glass) Zigzag Substrate (aquarium) Condensed matter physics Sputtering Crystallography Composite material Nanotechnology Chemistry Geology

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Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Particle accelerators and beam dynamics

Physical Sciences → Engineering → Aerospace Engineering

Preparation of superconducting YBaCuO thin films by rf magnetron sputtering

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