JOURNAL ARTICLE
Characterization and dielectric properties of (SrTiO3/BaTiO3)n multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by double rf magnetron sputtering
Chi‐Shiung HsiFu-Yuan ShiaoNan‐Chung WuMoo-Chin Wang
Year: 2003 Journal: Solid State Communications Vol: 125 (11-12)Pages: 633-636 Publisher: Elsevier BV
Keywords:
Materials science Dielectric Thin film Ferroelectricity Sputter deposition Coercivity Sputtering Polarization (electrochemistry) Cavity magnetron Analytical Chemistry (journal) Optoelectronics Condensed matter physics Nanotechnology Chemistry
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10
Cited By
0.41
FWCI (Field Weighted Citation Impact)
8
Refs
0.60
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Citation History
Topics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Microwave Dielectric Ceramics Synthesis
Physical Sciences → Engineering → Electrical and Electronic Engineering
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