Dielectric enhancement of BaTiO3/BaSrTiO3/SrTiO3 multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by sol–gel method

Ning Zhao; Lixi Wan; Liqiang Cao; Daquan Yu; Shuhui Yu; Rong Sun

doi:10.1016/j.matlet.2011.08.004

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Dielectric enhancement of BaTiO3/BaSrTiO3/SrTiO3 multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by sol–gel method

Ning Zhao Lixi Wan Liqiang Cao Daquan Yu Shuhui Yu Rong Sun

Year: 2011 Journal: Materials Letters Vol: 65 (23-24)Pages: 3574-3576 Publisher: Elsevier BV

DOI: 10.1016/j.matlet.2011.08.004

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Keywords:

Materials science Dielectric Thin film Sol-gel Substrate (aquarium) Capacitor Crystallite Layer (electronics) Composite material Dielectric loss Silicon High-κ dielectric Perovskite (structure) Optoelectronics Nanotechnology Chemical engineering Metallurgy Electrical engineering

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Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Dielectric materials and actuators

Physical Sciences → Engineering → Biomedical Engineering

Dielectric enhancement of BaTiO3/BaSrTiO3/SrTiO3 multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by sol–gel method

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