Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition

Timothy. Weber; Beihai Ma; U. Balachandran; M. J. McNallan

doi:10.1016/j.tsf.2004.09.018

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Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition

Timothy. Weber Beihai Ma U. Balachandran M. J. McNallan

Year: 2004 Journal: Thin Solid Films Vol: 476 (1)Pages: 79-83 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2004.09.018

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Keywords:

Full width at half maximum Materials science Amorphous solid Thin film Ion beam Analytical Chemistry (journal) Substrate (aquarium) Sputtering Surface roughness Optics Beam (structure) Optoelectronics Composite material Nanotechnology Chemistry Crystallography

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition

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