Biaxially textured Ag films by grazing ion beam assisted deposition

Daniel F. Förster; Sebastian Bleikamp; Thomas Michely

doi:10.1016/j.tsf.2010.06.007

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Biaxially textured Ag films by grazing ion beam assisted deposition

Daniel F. Förster Sebastian Bleikamp Thomas Michely

Year: 2010 Journal: Thin Solid Films Vol: 519 (2)Pages: 598-604 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2010.06.007

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Keywords:

Materials science Tilt (camera) Sputtering Texture (cosmology) Amorphous solid Ion beam Deposition (geology) Ion Irradiation Optics Thin film Beam (structure) Chemistry Crystallography Geometry Nanotechnology Geology Physics

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Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Biaxially textured Ag films by grazing ion beam assisted deposition

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