JOURNAL ARTICLE

Lithographical laser ablation using femtosecond laser

Yoshiki NakataT. OkadaMitsuo Maeda

Year: 2004 Journal:   Applied Physics A Vol: 79 (4-6)Pages: 1481-1483   Publisher: Springer Science+Business Media
Keywords:
Femtosecond Optics Laser Materials science Ablation Laser ablation X-ray laser Single shot Laser beams Resolution (logic) Optoelectronics Physics Laser power scaling

Metrics

56
Cited By
3.77
FWCI (Field Weighted Citation Impact)
10
Refs
0.93
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Nonlinear Optical Materials Studies
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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