JOURNAL ARTICLE
Lithographical laser ablation using femtosecond laser
Yoshiki NakataT. OkadaMitsuo Maeda
Year: 2004 Journal: Applied Physics A Vol: 79 (4-6)Pages: 1481-1483 Publisher: Springer Science+Business Media
Keywords:
Femtosecond Optics Laser Materials science Ablation Laser ablation X-ray laser Single shot Laser beams Resolution (logic) Optoelectronics Physics Laser power scaling
Metrics
56
Cited By
3.77
FWCI (Field Weighted Citation Impact)
10
Refs
0.93
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Nonlinear Optical Materials Studies
Physical Sciences → Engineering → Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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