JOURNAL ARTICLE

Development of laser turning using femtosecond laser ablation

Atsushi YokotaniKosuke KawaharaYasunobu KurogiNaoyuki MatsuoHiroshi SawadaKou Kurosawa

Year: 2002 Journal:   Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 4426 Pages: 90-90   Publisher: SPIE

Abstract

Ablation using femtosecond-lasers has taken much attention for micromachining with the advantages of efficient ultra-thin layer peeling without undesirable thermal effects for both opaque and transparent materials. In this work, we have proposed the femtosecond-laser turning based on the fact that femtosecond-laser ablation is a promising technique for excellent surface finishing techniques. The effect of the machining conditions such as focusing condition, energy of laser pulse and plural scanning, on the thickness of peeling layer for various kinds of materials (PMMA, silica glass, silicon, copper and aluminum) have been investigated. As a result, the important information for the laser turning as a practical application of the femtosecond lasers were obtained.

Keywords:
Femtosecond Materials science Laser Surface micromachining Laser beam machining Laser ablation Optics Silicon Optoelectronics Opacity Ablation X-ray laser Machining Layer (electronics) Nanotechnology Fabrication Laser power scaling Laser beams Metallurgy

Metrics

8
Cited By
1.33
FWCI (Field Weighted Citation Impact)
0
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Laser-induced spectroscopy and plasma
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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