<title>Accurate manipulation using laser technology</title>

Abstract

In the industrial production of electrical, optical, and micro-mechanical components, progress in miniaturization requires improved adjusting techniques. Sub-micrometer accuracy adjustment must be obtained within seconds, and the accuracy should be stable over many years. All methods that are presently applied for manipulation in sub-micron dimensions are cumbersome, time-consuming, and tedious, and require expensive equipment. A novel method, laser adjustment, is being explored in which permanent deformation of thin metal sheets are obtained by using thermo-mechanical stresses that occur when the sheets are locally heated using short, intense laser pulses. Manipulation along several degrees of freedom can be realized by both out-of-plane and in-plane laser adjustment or a combination thereof. Within the Brite-Euram project AMULET this new automated micro- manufacturing technology for mass production is developed in order to assemble components where tolerance conditions and accessibility are beyond human capability.