Pulsed-laser-induced crystallization of fluorinated amorphous and microcrystalline silicon films

Hong Soon Choi; Kyoung‐Je Jang; Byung-Hyuk Min; M. K. Han; Jin Jang

doi:10.1016/0022-3093(96)00092-0

ScienceGate Book Chapters

JOURNAL ARTICLE

Pulsed-laser-induced crystallization of fluorinated amorphous and microcrystalline silicon films

Hong Soon Choi Kyoung‐Je Jang Byung-Hyuk Min M. K. Han Jin Jang

Year: 1996 Journal: Journal of Non-Crystalline Solids Vol: 198-200 Pages: 945-948 Publisher: Elsevier BV

DOI: 10.1016/0022-3093(96)00092-0

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Microcrystalline Crystallization Amorphous solid Annealing (glass) Grain growth Grain size Nanocrystalline silicon Silicon Amorphous silicon Chemical engineering Crystallography Composite material Crystalline silicon Metallurgy Chemistry

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.15

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Pulsed-laser-induced crystallization of fluorinated amorphous and microcrystalline silicon films

Metrics

Topics

Related Documents

Light-Induced Effects on Fluorinated Amorphous and Microcrystalline Silicon Films

Ultrafast laser-induced crystallization of amorphous silicon films

Ultrafast laser-induced crystallization of amorphous silicon films

Transformation of microcrystalline silicon films by excimer-laser-induced crystallization

Tin-Induced Crystallization of Amorphous Silicon under Pulsed Laser Irradiation