Summary Abstract: Nucleation considerations in the wavelength-dependent activation selectivity of aluminum chemical-vapor deposition

G. S. Higashi; G. E. Blonder; Cass Fleming; V. R. McCrary; V. M. Donnelly

doi:10.1116/1.583838

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Summary Abstract: Nucleation considerations in the wavelength-dependent activation selectivity of aluminum chemical-vapor deposition

G. S. Higashi G. E. Blonder Cass Fleming V. R. McCrary V. M. Donnelly

Year: 1987 Journal: Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Vol: 5 (5)Pages: 1441-1443 Publisher: AIP Publishing

DOI: 10.1116/1.583838

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Abstract

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Keywords:

Nucleation Chemical vapor deposition Deposition (geology) Aluminium Materials science Wavelength Selectivity Chemical engineering Nanotechnology Chemistry Optoelectronics Composite material Geology Engineering Organic chemistry Catalysis

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Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Summary Abstract: Nucleation considerations in the wavelength-dependent activation selectivity of aluminum chemical-vapor deposition

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