A fabrication technology for multi-layer polymer-based microsystems with integrated fluidic and electrical functionality

Eileen Moss; Arum Han; A. Bruno Frazier

doi:10.1016/j.snb.2006.03.036

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JOURNAL ARTICLE

A fabrication technology for multi-layer polymer-based microsystems with integrated fluidic and electrical functionality

Eileen Moss Arum Han A. Bruno Frazier

Year: 2006 Journal: Sensors and Actuators B Chemical Vol: 121 (2)Pages: 689-697 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2006.03.036

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Keywords:

Kapton Microsystem Materials science Fluidics Polyimide Photolithography Layer (electronics) Fabrication Laser ablation Optoelectronics Microfluidics Nanotechnology Electrode Laser Electrical engineering Optics

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Topics

Microfluidic and Capillary Electrophoresis Applications

Physical Sciences → Engineering → Biomedical Engineering

Neuroscience and Neural Engineering

Life Sciences → Neuroscience → Cellular and Molecular Neuroscience

3D Printing in Biomedical Research

Physical Sciences → Engineering → Biomedical Engineering

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