Fluidic microsystems based on printed circuit board technology

Abstract

In this paper, fluidic microsystems based on an alternative fabricating technology are described. This technology mainly utilizes the manufacturing principles of printed circuit boards (PCBs). Minimal lateral structure dimensions of approximately 100 µm und vertical dimensions of some 10 µm are feasible. By introducing thin polymeric foils (6-13 µm in thickness) into a stack of PCBs, movable parts forming active or passive valves, pumps or sensors can be produced. The first results concerning several fluidic components based on PCB technology are presented.