Sputtered TiN thin films for improved corrosion resistance

Priyank Bhardwaj; Otto J. Gregory; K. Bragga; M.H. Richman

doi:10.1016/0169-4332(91)90390-6

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Sputtered TiN thin films for improved corrosion resistance

Priyank Bhardwaj Otto J. Gregory K. Bragga M.H. Richman

Year: 1991 Journal: Applied Surface Science Vol: 48-49 Pages: 555-566 Publisher: Elsevier BV

DOI: 10.1016/0169-4332(91)90390-6

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Keywords:

Tin Corrosion Materials science Sputtering Thin film Substrate (aquarium) Stoichiometry Metallurgy Deposition (geology) Composite material Nanotechnology Chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Sputtered TiN thin films for improved corrosion resistance

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