Ablation of uv-transparent materials with femtosecond uv excimer laser pulses

S. Küper; M. Stuke

doi:10.1016/0167-9317(89)90104-4

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Ablation of uv-transparent materials with femtosecond uv excimer laser pulses

S. Küper M. Stuke

Year: 1989 Journal: Microelectronic Engineering Vol: 9 (1-4)Pages: 475-480 Publisher: Elsevier BV

DOI: 10.1016/0167-9317(89)90104-4

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Keywords:

Excimer Ablation Materials science Excimer laser Femtosecond Laser Polytetrafluoroethylene Optics Optoelectronics Laser ablation Micrometer Composite material

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ablation of uv-transparent materials with femtosecond uv excimer laser pulses

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