Femtosecond uv excimer laser ablation

S. K�per; M. Stuke

doi:10.1007/bf00692122

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JOURNAL ARTICLE

Femtosecond uv excimer laser ablation

S. K�per M. Stuke

Year: 1987 Journal: Applied Physics B Vol: 44 (4)Pages: 199-204 Publisher: Springer Science+Business Media

DOI: 10.1007/bf00692122

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Keywords:

Fluence Ablation Materials science Excimer Excimer laser Femtosecond Laser Optics Irradiation Laser ablation X-ray laser Absorption (acoustics) Attenuation coefficient Laser power scaling Composite material Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Femtosecond uv excimer laser ablation

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