Reactive magnetron sputtering deposition and characterization of niobium carbide films

Kan Zhang; Mao Wen; Gang Cheng; Xiang Li; Qingnan Meng; Jianshe Lian; Weitao Zheng

doi:10.1016/j.vacuum.2013.06.012

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Reactive magnetron sputtering deposition and characterization of niobium carbide films

Kan Zhang Mao Wen Gang Cheng Xiang Li Qingnan Meng Jianshe Lian Weitao Zheng

Year: 2013 Journal: Vacuum Vol: 99 Pages: 233-241 Publisher: Elsevier BV

DOI: 10.1016/j.vacuum.2013.06.012

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Keywords:

Materials science Sputter deposition Carbon film Amorphous carbon Nanocomposite Amorphous solid Carbide Carbon fibers Crystallite Composite material Sputtering Niobium carbide Thin film Metallurgy Nanotechnology Composite number Crystallography Chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Reactive magnetron sputtering deposition and characterization of niobium carbide films

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