Microstructure and Optical Properties of Fluorocarbon Films Deposited by Pulsed Plasma Thruster

Abstract

Fluorocarbon films with different structural and optical properties were deposited by Pulsed Plasma Thruster. The film composition and chemical structure was investigated with XPS. Transmittance and reflectance of the films were tested using UV-vis spectrometer. The results showed that, each sample basically has a strong absorption property for wavelength below 600nm and relatively weak absorption property for wavelength over 600nm. Chemical composition and structure influenced the optical properties of the films and different transmittance and reflectance was observed at different angle.