JOURNAL ARTICLE
High voltage thin film transistors integrated with MEMS
Eugene M. ChowJeng Ping LuJackson HoChinwen ShihDirk De BruykerMichel A. RosaEric Peeters
Year: 2005 Journal: Sensors and Actuators A Physical Vol: 130-131 Pages: 297-301 Publisher: Elsevier BV
Keywords:
Microelectromechanical systems Materials science Voltage Transistor Optoelectronics Substrate (aquarium) Fabrication Cantilever Low voltage High voltage Electrical engineering Nanotechnology Engineering Composite material
Metrics
34
Cited By
0.32
FWCI (Field Weighted Citation Impact)
15
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
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