Sapphire surface patterning using femtosecond laser micromachining

Cho-Wei Chang; Chien‐Yu Chen; Tien-Li Chang; Chia‐Jen Ting; Chien-Ping Wang; Chang‐Pin Chou

doi:10.1007/s00339-012-7048-6

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Sapphire surface patterning using femtosecond laser micromachining

Cho-Wei Chang Chien‐Yu Chen Tien-Li Chang Chia‐Jen Ting Chien-Ping Wang Chang‐Pin Chou

Year: 2012 Journal: Applied Physics A Vol: 109 (2)Pages: 441-448 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-012-7048-6

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Keywords:

Sapphire Surface micromachining Laser Femtosecond Materials science Laser ablation Optoelectronics Etching (microfabrication) Optics Ti:sapphire laser Nanotechnology Fabrication Layer (electronics)

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Sapphire surface patterning using femtosecond laser micromachining

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