Femtosecond laser micromachining of sapphire

K.-S. Kim; David R.H. Jones; E.A.J.M. Bente; John M. Girkin; Martin D. Dawson

doi:10.1109/leos.2001.969038

ScienceGate Book Chapters

JOURNAL ARTICLE

Femtosecond laser micromachining of sapphire

K.-S. Kim David R.H. Jones E.A.J.M. Bente John M. Girkin Martin D. Dawson

Year: 2002 Vol: 2 Pages: 762-763

DOI: 10.1109/leos.2001.969038

Get Full-Text PDF Get Analytical Report

Abstract

50 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material.

Keywords:

Surface micromachining Sapphire Materials science Laser Laser ablation Femtosecond Machining Laser beam machining Ti:sapphire laser Optoelectronics Ablation X-ray laser Optics Laser beams Laser power scaling Fabrication Metallurgy Engineering

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.07

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-Ablation Synthesis of Nanoparticles

Physical Sciences → Engineering → Biomedical Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Femtosecond laser micromachining of sapphire

Abstract

Metrics

Citation History

Topics

Related Documents

Sapphire surface patterning using femtosecond laser micromachining

Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface

Fabrication of sealed sapphire microfluidic devices using femtosecond laser micromachining

Femtosecond Laser Micromachining