Highly conductive and highly transparent n-type microcrystalline silicon thin films

Rodrigo Martins; A. Maçarico; I. Ferreira; Rita G. Nunes; A. Bicho; Elvira Fortunato

doi:10.1016/s0040-6090(97)00087-4

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Highly conductive and highly transparent n-type microcrystalline silicon thin films

Rodrigo Martins A. Maçarico I. Ferreira Rita G. Nunes A. Bicho Elvira Fortunato

Year: 1997 Journal: Thin Solid Films Vol: 303 (1-2)Pages: 47-52 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(97)00087-4

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Keywords:

Microcrystalline Microcrystalline silicon Materials science Thin film Optoelectronics Silicon Thin-film transistor Amorphous solid Amorphous silicon Plasma-enhanced chemical vapor deposition Chemical vapor deposition Deposition (geology) Nanotechnology Crystalline silicon Chemistry Crystallography Layer (electronics)

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Highly conductive and highly transparent n-type microcrystalline silicon thin films

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