Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications

Ya Cheng; Koji Sugioka; Katsumi Midorikawa

doi:10.1016/j.apsusc.2005.03.078

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Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications

Ya Cheng Koji Sugioka Katsumi Midorikawa

Year: 2005 Journal: Applied Surface Science Vol: 248 (1-4)Pages: 172-176 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2005.03.078

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Keywords:

Microfabrication Femtosecond Microfluidics Materials science Laser Microreactor Microchannel Optoelectronics Lab-on-a-chip Optics Nanotechnology Fabrication Chemistry

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications

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