Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

Koji Sugioka; Masashi Masuda; T. Hongo; Ya Cheng; Kazuhiko Shihoyama; Katsumi Midorikawa

doi:10.1007/s00339-004-2569-2

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Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

Koji Sugioka Masashi Masuda T. Hongo Ya Cheng Kazuhiko Shihoyama Katsumi Midorikawa

Year: 2004 Journal: Applied Physics A Vol: 79 (4-6)Pages: 815-817 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-004-2569-2

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Keywords:

Femtosecond Microfluidics Materials science Hydrofluoric acid Laser Lab-on-a-chip Annealing (glass) Chip Nanotechnology Optoelectronics Rapid prototyping Optics Composite material Metallurgy Computer science

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Microfluidic and Capillary Electrophoresis Applications

Physical Sciences → Engineering → Biomedical Engineering

Electrowetting and Microfluidic Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

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