JOURNAL ARTICLE
Properties of NbN Films Prepared by Reactive Magnetron Sputtering
Year: 1993 Journal: physica status solidi (a) Vol: 137 (1)Pages: K25-K28 Publisher: Wiley
Keywords:
Slovak Sputtering Technical university Engineering physics Library science Physics Materials science Mechanical engineering Engineering Computer science Nanotechnology Thin film Philosophy Czech
Metrics
2
Cited By
1.35
FWCI (Field Weighted Citation Impact)
4
Refs
0.77
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Particle accelerators and beam dynamics
Physical Sciences → Engineering → Aerospace Engineering
Metallurgical and Alloy Processes
Physical Sciences → Materials Science → General Materials Science
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Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering
Kluwer Academic Publishers eBooks Year: 2006 Pages: 43-56