JOURNAL ARTICLE

Light emission of silicon oxynitride films prepared by reactive sputtering of silicon

Shyankay JouI-Che LiawYu‐Chia ChengChia‐Hui Li

Year: 2012 Journal:   Journal of Luminescence Vol: 134 Pages: 853-857   Publisher: Elsevier BV
Keywords:
X-ray photoelectron spectroscopy Silicon oxynitride Photoluminescence Materials science Silicon Sputtering Raman spectroscopy Amorphous solid Analytical Chemistry (journal) Electroluminescence Silicon oxide Amorphous silicon Annealing (glass) Crystalline silicon Thin film Optoelectronics Nanotechnology Chemistry Chemical engineering Crystallography Optics Silicon nitride Layer (electronics) Metallurgy

Metrics

15
Cited By
0.44
FWCI (Field Weighted Citation Impact)
42
Refs
0.59
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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