JOURNAL ARTICLE

Electrical Properties of Thin Polycrystalline Lead Films

E. S. M. HiggyS. M. YoussefS. A. El-SahharMohamed Talaat

Year: 1987 Journal:   physica status solidi (a) Vol: 102 (1)Pages: 301-306   Publisher: Wiley

Abstract

The resistivity of thin lead films is measured as a function of film thickness at different temperatures. The films are deposited onto crystalline mica substrates with deposition rates of 1.05 nm/s. The substrates are maintained at room temperature during deposition, while the resistivity is measured at different temperatures. The mean free path l0, bulk resistivity ϱ0, thermal coefficient of resistance TCR, activation energy of conduction electrons ΔE, concentration of conduction electrons ni, and their mobility μ are estimated and correlated with the polycrystalline nature of lead films as well as their morphological characteristics. Es wird der Widerstand dünner Bleischichten in Abhängigkeit von der Schichtdicke bei verschiedenen Temperaturen gemessen. Die Schichten werden auf kristalline Glimmersubstrate mit Abscheidungsraten von 1,05 nm/s aufgebracht. Die Substrate werden während der Abscheidung bei Zimmertemperatur gehalten, während der Widerstand bei verschiedenen Temperaturen gemessen wird. Die mittlere freie Weglänge l0, der Volumenwiderstand ϱ0, der thermische Widerstandskoeffizient TCR, die Aktivierungsenergie der Leitungselektronen ΔE, die Konzentration der Leitungselektronen ni und ihre Beweglichkeit μ, werden bestimmt und sowohl mit der polykristallinen Natur der Bleischichten als auch mit ihren morphologischen Charakteristiken korreliert.

Keywords:
Electrical resistivity and conductivity Crystallite Activation energy Chemistry Thin film Substrate (aquarium) Temperature coefficient Analytical Chemistry (journal) Materials science Die (integrated circuit) Composite material Crystallography Nanotechnology Physics Physical chemistry

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Topics

Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Surface and Thin Film Phenomena
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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