YBCO and BSCCO thin films prepared by wet MOCVD

Abstract

The newly developed technique of low-pressure single aerosol source MOCVD (wet MOCVD) has been applied to prepare thin films of YBa2Cu3Ox and Bi2Sr2CaCU2Ox. The influence of the deposition rate, ρo2–T conditions, film stoichiometry on the phase composition, orientation and superconducting properties of the films was studied and compared for both systems. Thin films of YBa2Cu3Ox with high-Tc(end)= 92 K, jc(77 K)= 1.7 × 106 A cm–2; Bi2Sr2CaCu2Oxwith Tc(end)= 84 K, jc(77K)= 1 × 104A cm–2 were deposited. On the basis of the crystal chemistry approach the conditions for the various orientations were established.