Optical FM Heterodyne Interferometry For Range And Displacement Measurements

Ryuji Kobayashi; Jiang Shudong

doi:10.1109/cpem.1988.671217

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JOURNAL ARTICLE

Optical FM Heterodyne Interferometry For Range And Displacement Measurements

Ryuji Kobayashi Jiang Shudong

Year: 1988 Pages: 133-134

DOI: 10.1109/cpem.1988.671217

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Abstract

A novel technique of frequency modulated ( FM ) heterodyne interferometer has been realized for measuring remotely the range and the displacement of both specular reflectors and diffuse surface objects using a FM semiconductor laser. The resolution better than 7 um was realized for the range measurement and about 1 nm for the displacement measurement with specular targets for ranges to about 2 m.

Keywords:

Optics Specular reflection Heterodyne (poetry) Interferometry Displacement (psychology) Frequency modulation Materials science Heterodyne detection Laser Range (aeronautics) Dynamic range Physics Acoustics Radio frequency Telecommunications Computer science

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Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advanced Optical Sensing Technologies

Physical Sciences → Physics and Astronomy → Instrumentation

Optical FM Heterodyne Interferometry For Range And Displacement Measurements

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