Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Ju Yi Lee; Hui-Yi Chen; Cheng-Chih Hsu; Chyan-Chyi Wu

doi:10.1016/j.sna.2007.02.017

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Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Ju Yi Lee Hui-Yi Chen Cheng-Chih Hsu Chyan-Chyi Wu

Year: 2007 Journal: Sensors and Actuators A Physical Vol: 137 (1)Pages: 185-191 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2007.02.017

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Keywords:

Grating Optics Heterodyne (poetry) Interferometry Displacement (psychology) Lock-in amplifier System of measurement Heterodyne detection Physics Resolution (logic) Phase (matter) Amplifier Laser Acoustics Optoelectronics Computer science

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Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

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HETERODYNE HOLOGRAPHIC INTERFEROMETRY: HIGH-RESOLUTION RANGING AND DISPLACEMENT MEASUREMENT