The coordination of metal atoms at CoSi2/Si(111) and NiSi2/Si(111) Interfaces: Cluster calculations

P. J. van den Hoek; Walter Ravenek; E. J. Baerends

doi:10.1016/0039-6028(88)90302-0

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The coordination of metal atoms at CoSi2/Si(111) and NiSi2/Si(111) Interfaces: Cluster calculations

P. J. van den Hoek Walter Ravenek E. J. Baerends

Year: 1988 Journal: Surface Science Vol: 205 (3)Pages: 549-568 Publisher: Elsevier BV

DOI: 10.1016/0039-6028(88)90302-0

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Keywords:

Cluster (spacecraft) Atom (system on chip) Silicon Materials science Metal Crystallography Density functional theory Chemical physics Chemistry Computational chemistry Optoelectronics Metallurgy

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Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Surface and Thin Film Phenomena

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

The coordination of metal atoms at CoSi2/Si(111) and NiSi2/Si(111) Interfaces: Cluster calculations

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