JOURNAL ARTICLE

Photodissolution of n-GaAs electrodes under laser illumination: control of the etching profile

Isabelle GérardNathalie SimonJackie VigneronC. MathieuArnaud Etchéberry

Year: 2001 Journal:   Semiconductor Science and Technology Vol: 16 (4)Pages: 222-226   Publisher: IOP Publishing

Abstract

International audience

Keywords:
Photocurrent Etching (microfabrication) Laser Chemistry Optoelectronics Isotropic etching Electrode Polarization (electrochemistry) Photoconductivity Materials science Optics Analytical Chemistry (journal) Layer (electronics) Nanotechnology

Metrics

7
Cited By
1.97
FWCI (Field Weighted Citation Impact)
30
Refs
0.85
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Semiconductor Quantum Structures and Devices
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Laser Design and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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