Micro-fabrication by femtosecond laser pulses

Abstract

Optical microstructures are very important for the realization of multifunctional optics and photonics devices. In the last decade, with the development of commercial femtosecond laser, it has been proven that micro-structuring with femtosecond laser pulses is an excellent tool for free design micro-fabrication of almost all kinds of materials. With the filament, spatially scanning and other methods, many types of 0 to 3-dimensional optical microstructures, including optical memory, waveguides, gratings, couplers and photonic crystals, were produced successfully inside a wide variety of transparent materials of solid state and also liquid state. Here we reviewed the proceeding of the micro-fabrication technology by femtosecond laser pulses in the last few years.