Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses

Chih‐Wei Cheng; Wufeng Shen; Chih‐Yung Lin; Y. J. Lee; J.S. Chen

doi:10.1007/s00339-010-5810-1

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Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses

Chih‐Wei Cheng Wufeng Shen Chih‐Yung Lin Y. J. Lee J.S. Chen

Year: 2010 Journal: Applied Physics A Vol: 101 (2)Pages: 243-248 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-010-5810-1

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Keywords:

Materials science Laser Amorphous solid Scanning electron microscope Indium tin oxide Femtosecond Transmission electron microscopy Optoelectronics Thin film Fabrication Irradiation Sapphire Fluence Nanostructure Optics Nanotechnology Crystallography Composite material Chemistry

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses

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