Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

Ruoming An; Yan Li; Yi Dou; D. Liu; Hong Yang; Qihuang Gong

doi:10.1007/s00339-005-3456-1

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Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

Ruoming An Yan Li Yi Dou D. Liu Hong Yang Qihuang Gong

Year: 2006 Journal: Applied Physics A Vol: 83 (1)Pages: 27-29 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-005-3456-1

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Keywords:

Femtosecond Scanning electron microscope Materials science Laser drilling Microfluidics Ablation Laser Laser ablation Optics Drilling Silica glass Nanotechnology Composite material Metallurgy

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

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