JOURNAL ARTICLE

Rapid thermal annealing of indium-implanted gallium arsenide

А. Н. АкимовЛ. А. ВласуковаФ. Ф. КомаровM. Kulik

Year: 1993 Journal:   Journal of Applied Spectroscopy Vol: 59 (1-2)Pages: 533-536   Publisher: Springer Science+Business Media
Keywords:
Gallium arsenide Materials science Annealing (glass) Indium Gallium Optoelectronics Indium arsenide Metallurgy

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4
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0.11
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Citation History

Topics

Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering

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