Rapid thermal annealing of indium-implanted gallium arsenide

JOURNAL ARTICLE

Year: 1993 Journal: Journal of Applied Spectroscopy Vol: 59 (1-2)Pages: 533-536 Publisher: Springer Science+Business Media

DOI: 10.1007/bf00663365

Keywords:

Gallium arsenide Materials science Annealing (glass) Indium Gallium Optoelectronics Indium arsenide Metallurgy

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