Polymeric optical waveguides fabrication by direct write electron beam lithography

Jun Zhou; Wing‐Han Wong; Edwin Yue‐Bun Pun

doi:10.1364/nlgw.2001.mc6

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JOURNAL ARTICLE

Polymeric optical waveguides fabrication by direct write electron beam lithography

Jun Zhou Wing‐Han Wong Edwin Yue‐Bun Pun

Year: 2001 Journal: Nonlinear Guided Waves and Their Applications Pages: MC6-MC6

DOI: 10.1364/nlgw.2001.mc6

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Abstract

Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31 um and 1.55 um, respectively.

Keywords:

Electron-beam lithography Lithography Fabrication Materials science Cathode ray Optics X-ray lithography Photolithography Optoelectronics Next-generation lithography Stencil lithography Electron Beam (structure) Polymer Resist Nanotechnology Physics

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Polymeric optical waveguides fabrication by direct write electron beam lithography

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