JOURNAL ARTICLE
Effect of hydrogen on passivation quality of SiNx/Si-rich SiNx stacked layers deposited by catalytic chemical vapor deposition on c-Si wafers
Trinh Cham ThiKoichi KoyamaKeisuke OhdairaHideki Matsumura
Year: 2014 Journal: Thin Solid Films Vol: 575 Pages: 60-63 Publisher: Elsevier BV
Keywords:
Passivation Wafer Materials science Chemical vapor deposition Silicon nitride Layer (electronics) Silicon Hydrogen Dilution Deposition (geology) Optoelectronics Plasma-enhanced chemical vapor deposition Nanotechnology Chemistry
Metrics
20
Cited By
1.29
FWCI (Field Weighted Citation Impact)
8
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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