Structural, electrical, and optical properties of reactively sputtered SnO2 thin films

Sarah Eunkyung Kim; Manny Oliver

doi:10.1007/s12540-010-0614-6

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Structural, electrical, and optical properties of reactively sputtered SnO2 thin films

Sarah Eunkyung Kim Manny Oliver

Year: 2010 Journal: Metals and Materials International Vol: 16 (3)Pages: 441-446 Publisher: Springer Science+Business Media

DOI: 10.1007/s12540-010-0614-6

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Keywords:

Crystallinity Materials science Amorphous solid Thin film Sputtering Substrate (aquarium) Sputter deposition Electrical resistivity and conductivity Diffraction Deposition (geology) Optoelectronics Analytical Chemistry (journal) Composite material Optics Nanotechnology Crystallography

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Structural, electrical, and optical properties of reactively sputtered SnO2 thin films

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