JOURNAL ARTICLE

Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers

Keywords:
Piezoresistive effect Materials science Nanoelectromechanical systems Silicon nitride Pressure sensor Diaphragm (acoustics) Optoelectronics Silicon Layer (electronics) Microelectromechanical systems Nanowire Linearity Silicon nanowires Nanotechnology Electronic engineering Electrical engineering Engineering

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11
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0.24
FWCI (Field Weighted Citation Impact)
4
Refs
0.59
Citation Normalized Percentile
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
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