Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers

Liang Lou; Songsong Zhang; Li-Shiah Lim; Woo‐Tae Park; Hanhua Feng; Dim‐Lee Kwong; Chengkuo Lee

doi:10.1016/j.proeng.2011.12.354

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Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers

Liang Lou Songsong Zhang Li-Shiah Lim Woo‐Tae Park Hanhua Feng Dim‐Lee Kwong Chengkuo Lee

Year: 2011 Journal: Procedia Engineering Vol: 25 Pages: 1433-1436 Publisher: Elsevier BV

DOI: 10.1016/j.proeng.2011.12.354

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Keywords:

Piezoresistive effect Materials science Nanoelectromechanical systems Silicon nitride Pressure sensor Diaphragm (acoustics) Optoelectronics Silicon Layer (electronics) Microelectromechanical systems Nanowire Linearity Silicon nanowires Nanotechnology Electronic engineering Electrical engineering Engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers

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