JOURNAL ARTICLE

Heteroepitaxial growth and ESR evaluation of 3C-SiC

Hiroyuki NagasawaYuta YamaguchiTakato IzumiK. Tonosaki

Year: 1993 Journal:   Applied Surface Science Vol: 70-71 Pages: 542-545   Publisher: Elsevier BV
Keywords:
Dangling bond Electron paramagnetic resonance Atmospheric temperature range Materials science Carbide Amorphous solid Silicon carbide Analytical Chemistry (journal) Adsorption Growth rate Chemical vapor deposition Paramagnetism Silicon Crystallography Chemistry Nuclear magnetic resonance Nanotechnology Physical chemistry Metallurgy Condensed matter physics Thermodynamics

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16
Cited By
1.38
FWCI (Field Weighted Citation Impact)
9
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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