JOURNAL ARTICLE
Electrical properties of thin high- dielectric Ta2O5 films
Year: 1994 Journal: Microelectronics Journal Vol: 25 (7)Pages: 533-537 Publisher: Elsevier BV
Keywords:
Materials science Dielectric Engineering physics High-κ dielectric Thin film Optoelectronics Electrical engineering Composite material Nanotechnology Engineering
Metrics
10
Cited By
0.44
FWCI (Field Weighted Citation Impact)
5
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
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