JOURNAL ARTICLE

Electrical properties of thin high- dielectric Ta2O5 films

N. RauschEdmund P. Burte

Year: 1994 Journal:   Microelectronics Journal Vol: 25 (7)Pages: 533-537   Publisher: Elsevier BV
Keywords:
Materials science Dielectric Engineering physics High-κ dielectric Thin film Optoelectronics Electrical engineering Composite material Nanotechnology Engineering

Metrics

10
Cited By
0.44
FWCI (Field Weighted Citation Impact)
5
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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