JOURNAL ARTICLE

Nano-photomask fabrication using focused ion beam direct writing

Keywords:
Photomask Fabrication Materials science Ion beam Optics Focused ion beam Beam (structure) Dwell time Nano- Maskless lithography Optoelectronics Nanotechnology Ion Resist Electron-beam lithography Chemistry Physics

Metrics

24
Cited By
2.06
FWCI (Field Weighted Citation Impact)
12
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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